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Nanometrics Nanospec 6100 |
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Nanospec 6100 |
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NANOMETRICS |
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8"
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Vintage |
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Refurbished
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Measurement Range : 25¡×- 20µm
- 500?-200 um with the visible light source (400 to 800nm halogen lamp)
- 25?- 500?with UV light source (210 - 400nm Deuterium lamp).
?Linear Array Head
?Automated focusing
?Joystick-automated stage with twin chuck ( 8inch, 6inch)
?CV -S3200 CCD Camera
?Objectives (Auto revolver) : Olympus 4X, 10X, 15X
?2D and 3D wafer-mapping software
?S/W Version : 1.63, OS : Windows 2000 |
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