Baekseokgongdan 3-gil 66,Seobuk-gu,Cheonan-si,Chungcheongnam-do,Korea 331-979
Tel:+82-41-554-6920~1, Fax:+82-41-554-6922
E-mail: chj@jenesis.co.kr
http://jenesisequipment.com
JENESIS EQUIPMENT LIST
No. Tool's Name Maker Model Vintage W/F size
1 AMC 7700 EPI Reactor APPLIED MATERIALS AMC 7700 6
2 AMC 7700 EPI Reactor with Moore Uniformity Kit APPLIED MATERIALS AMC 7700 6
3 BIO-RAD QS-1200 FT-IR BIO-RAD QS-1200 12
4 BIO-RAD/Accent QS-408M FT-IR BIO-RAD QS-408M 1996 8
5 Fischione 1010 Ion Milling and Polishing System FISCHIONE Model 1010 0
6 Hitachi S-5500 In-lens FE SEM HITACHI S-5500 0
7 Hitachi SEM S-4160 HITACHI S-4160 2000 8
8 Hitachi SEM S-5000 HITACHI S-5000 1996 0
9 KLA-Tencor Archer 100 Overlay Metrology KLA TENCOR Archer 100 2006 12
10 KLA-Tencor Archer 10XT Overlay Metrology KLA TENCOR Archer 10XT 12
11 KLA-Tencor Archer 10XT+(AIM+) Overlay Metrology KLA TENCOR Archer 10XT+ (AIM+) 2006 12
12 KLA-Tencor Archer AIM+ Overlay Metrology KLA TENCOR Archer AIM+ 2006 12
13 KLA-Tencor Candela 8620 Optical Defect Inspection KLA TENCOR Candela 8620 2010 0
14 KLA-Tencor Candela CS10 Optical Defect Inspection KLA TENCOR CS10V 2010 6
15 KLA-Tencor Surfscan 6200 particle counter KLA TENCOR SFS 6200 1994 8
16 KLA-Tencor Surfscan 6200 Particle Counter KLA TENCOR SFS 6200 8
17 LEICA INS10 NIDEK LEICA INS10 8
18 Leica INS3000 (Dual)Defect Inspection System LEICA INS 3000 1999 8
19 Leica INS3300 Defect Inspection System LEICA INS 3300 2003 12
20 LEO/KOBELCO LTA-700 Wafer Lifetime Mesurement System LEO/KOBELCO LTA-700 1997 6
21 Micro manupulator Manual Probe Station 6400F MICROMANUPULATOR 6400F 8
22 N&K 1700 Trench Depth & Thin film thickness Measurement N&K N&K 1700 8
23 N&K 3000 Trench Depth & Thin film thickness Measurement N&K N&K 3000 6
24 N&K 3700 RT Metrology System N&K N&K 3700 RT 2004 8
25 N&K 5700 CDRT Metrology system N&K N&K 5700 CDRT 2006 0
26 N&K 8000 CD Trench Depth & Thin film thickness Measurement N&K N&K Little foot 8000 CD 2007 8
27 Nanometrics Nanospec 4000 Film Thickness Measurement NANOMETRICS AFT4000 6
28 Nanometrics Nanospec 4150 Film Thickness Measurement NANOMETRICS NANOSPEC 4150 8
29 Nanometrics Nanospec 6100 Thin Film Thickness Measurement NANOMETRICS NANAOSPEC 6100 2007 8
30 Nanometrics Nanospec 9300 Thin Film Thickness Measurement NANOMETRICS Nanospec 9300 2002 12
31 NIDEK 5" Wafer Autoloader IM-11 NIDEK IM-11 5
32 NIDEK 8" Wafer Autoloader IM-14 NIDEK IM-14 8
33 Nikon Eclips L200 Microscope NIKON Nikon Eclips L200 8
34 Nikon LV 150 Mcroscope NIKON LV150 8
35 Nikon NWL641M Wafer Autoloader NIKON NWL641M 2001 6
36 Olympus MX50A-F Microscope & AL100-LM6 Autoloader OLYMPUS MX50A-F & AL100-LM6 6
37 Olympus MX61 Microscope & AL110-LMB8 Autoloader OLYMPUS MX61+AL110-LMB8 8
38 Olympus MX80-F Microscope (up to 300mm wafer) OLYMPUS MX80F 12
39 RIKEN Portable Gas Leak Detector RIKEN GH-202F 2007 8
40 Rudolph/August AXI 930 Macro Inspection System RUDOLPH AXI-930 8
41 Rudolph/August AXI-S Macro Inspection System RUDOLPH AXI-S 8
42 SDI/SEMILAB FAaST 200-SL Non contact CV/IV Measurement SDI/SEMILAB FAaST 200 SL 8
43 Semilab WT-2000 SDI/SEMILAB WT-2000 2007 8
44 SONIX Quantum 350 Scanning Acoustic Microscopy (SAM) SONIX Quantum 350 2006 8
45 SSM 150 Auto Spreading Resistance Probe (ASRP) SOLID STATE MEASRUEMENT INC. SSM150 1999 0
46 SSM 5200 Automatic CV System for CV/QV/IV measurement SOLID STATE MEASRUEMENT INC. SSM5200 1997 8
47 SSM 530 HG-CV System for EPI resistivity measurement SOLID STATE MEASRUEMENT INC. SSM530 2004 12
48 Tencor / Prometrix RS 35 (RS35) 4PP PROMETRIX RS 35 8
49 Tencor FLX-2908 Thin Film Stress Measurement KLA TENCOR FLX2908 1996 8
50 Tencor HRP100 Step Height Measurement Sytem KLA TENCOR HRP100 1998 8
51 Tencor HRP220 Step Height Measurement Sytem KLA TENCOR HRP220 2000 8
52 Tencor P-10 Step Height Measurement System KLA TENCOR P-10 1997 8
53 Tencor P-11 Step Height Measurement System KLA TENCOR P-11 1997 8
54 TENCOR P16+ Surface Profiler KLA TENCOR P16+ 8
55 Tencor P-2 Step Height Measurement System KLA TENCOR P-2 8
56 Tencor P-20(H) Step Height Measurement System KLA TENCOR P-20H 8
57 Tencor P-20(H) Step Height Measurement Sytem KLA TENCOR P-20H 8
58 Tencor Viper 2410 Macro Defect Inspection KLA TENCOR VIPER 2410 2001 8
59 Tencor Viper 2410 Macro Defect Inspection KLA TENCOR VIPER 2410 2000 8
60 Thermawave OP2600 THERMAWAVE OP2600 1994 8
61 TOHO FLX2320-S TOHO FLX2320-S 2007 8
62 Union Hisomet-II Measuring Microscope UNION Hisomet-II 0
63 Zeiss Axiotron HSEB Microscope CARL ZEISS HSEB 8