|
장비정보
|
|
장비명
|
SDI/SEMILAB FAaST 230 Non-contact CV/IV Measurement System |
| 모델명 |
FAaST 230 |
제조사 |
SDI/SEMILAB |
| 웨이퍼사이즈 |
8"
|
Vintage |
- |
| 매매상태 |
판매중
|
장비상태 |
AS-IS
|
| 제원 |
. Up to 8"
. Automatic robotic wafer handling
. Single open-cassette wafer loading station
. Measurement of dielectric and interface properties on monitor wafer
- Dielectric Capacitance (CD) and Thickness (EOT)
- Dielectric Leakage Current (I-V)
- Flatband Voltage (Vfb)
- Interface Trap Density (Dit)
- Interface Trapped Charge (Qit)
- Semiconductor Surface Barrier (Vsb)
- Oxide Total Charge (Qtot)
- Mobile Ionic Charge (Qm), among others
. Suitable for measurement on:
- Semiconductor wafers (e.g. Si, SiGe, InGaAs, SiC, GaN) with high-k and low-k dielectric films (e.g. SiO2, SiNx, Al2O3, HfO2 ;..) |
|
|
|
HOME > 장비 정보 