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장비정보
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장비명
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Semilab WT-2020( μ-PCR) Carrier life time measurement |
| 모델명 |
WT-2020 |
제조사 |
SDI/SEMILAB |
| 웨이퍼사이즈 |
8"
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Vintage |
2018-4 |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
■ System Configuration
. WT2020 main unit with scanning capability
. Dual PC : DOS PC & Window PC
. μ-PCR head for lifetime measurements
. Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC )
. Vacuum pump
. Utility :
- Power : 220V or 115V, 50/60Hz
- Vacuum : 1/4" 0.2 ~0.5 bar
■ Hadware Function Capability
. μ-PCD measurement (904 nm Laser)
. Laser Power Feedback
. AUX Laser (Option) : 500 mW, 349nm
. Others
■ Application
. Monitoring defects and contamination ( bulk and surface region of Si wafer)
. Characterization of thin film samples
■ Measurement
. Carrier Lifetime Measurement ( μ-PCD/μ-PCD )
. High resolution mapping and discrete point measurements
. Characterization of thin film samples
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