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장비정보
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장비명
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Tencor P-16+ stylus surface profiler |
| 모델명 |
P16+ |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2012-3 |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
The KLA-Tencor P-16+ Profiler is a highly sensitive surface profiler that
measures step height, roughness, and waviness on sample surfaces.
•; Up to 8" wafer size
•; Microhead 5
•; Dual view optic (Top & side)
•; Lens : 6.4X , Magnification Range : 300X~1012X
•; Repeatability : 6 Å;; or 0.1% (1 s),
*. To be refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time. |
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