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장비정보
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장비명
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Tencor P-17 stylus surface profiler |
| 모델명 |
P-17 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2017- |
| 매매상태 |
판매중
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장비상태 |
수리중
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| 제원 |
[Features]
- Step height: Nanometers to 1000µ;m
- Step height repeatability : 4 Å; ( 1σ, 1µ;m )
- Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg )
- Scan full diameter of the sample without stitching for bow and film stress measurement
- Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage
- Dual view optics ( side and top )
- Fully automated with sequencing, pattern recognition
[Applications]
- Step Height mesurement (2D/3D)
- Roughness and Waviness
- Bow and Shape
- Thin film Stress
- Defect review ( Defect surface topography)
*. To be refurbished.
*. Installed in Clean-room. |
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