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장비정보
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장비명
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*(SOLD)TENCOR P16+ Surface Profiler |
| 모델명 |
P16+ |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
- |
| 매매상태 |
판매완료
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장비상태 |
Excellent
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| 제원 |
The KLA-Tencor P-16+ Profiler is a highly sensitive surface profiler that
measures step height, roughness, and waviness on sample surfaces.
•; Up to 8" wafer size
•; Stylus 2.0 μm 60 degree radius
•; Microhead 5 SR (standard range) measurement head
- Vertical range: 0-327μm
- Stylus force: 1 - 50mg
- 13 μm, resolution < 0.01 Å;
- 64 μm, resolution < 0.04 Å;
- 327 μm, resolution < 0.20 Å;
•; Dual view optic (Top & side)
•; Lens : 6.4X , Magnification Range : 300X~1012X
•; S/W Version : 7.21, OS : Windows XP SP2
•; Apex software (Option)
•; Repeatability : 6 Å; or 0.1% (1 s),
•; Reproducibility : 15.0 Å; or 0.25% (1 s)
Installed cleanroom
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