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장비정보
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장비명
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*KLA-Tencor Archer AIM+ Overlay Metrology |
| 모델명 |
Archer AIM+ |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
12"
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Vintage |
2006- |
| 매매상태 |
판매완료
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장비상태 |
Refurbished
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| 제원 |
Currently 12" configured,
( Available size conversion for 8" open cassette handling )
Overlay measurement for ≥45 nm technology nodes
Archer AIM+ Main :
Industrial PC & LCD monitor
Software Version(OS) : Windows XP,V2002SP1
Software Version(APP) : Archer 5.50.03P01
AIM
Multilayer
ANRA
BFCD
CPM
VIS Color Filter
E40E90E94
E87
GEM
Target diagnostic
XY Separation
Imageless
Kawasaki Robot & Robot controller
TDK TAS300 Loadport (Triple)
Installed in our cleanroom.
Demo test available
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