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장비정보
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장비명
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Tencor P-16+ stylus surface profiler |
| 모델명 |
P-16+ |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2013-3 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
The KLA-Tencor P-16+ Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces.
- Up to 8" wafer size
- Microhead 5 - xr
- Stylus tip (green): 2 um radius
- Dual view optic (Top & side)
- Lens : 6.4X , Magnification Range : 173X~750X
- Frame Grabber : USB Camera (Ueye UI221x-M)
- OS: Windows XP
- S/W: Ver 7.45
- Option S/W : APEX
- Repeatability : 7.5 Å;;; or 0.1% (1 s),
- Including Anti-Vibration Table
*. Installed in Clean-room.
*. Can demonstrate any time.
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