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장비정보
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장비명
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*Nanometrics Nanospec ATLAS Thin Film Thickness Measurement |
| 모델명 |
atlas |
제조사 |
NANOMETRICS |
| 웨이퍼사이즈 |
8"
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Vintage |
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| 매매상태 |
판매완료
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장비상태 |
수리중
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| 제원 |
* Atlas is capable of housing up to five critical metrology technologies at one time.
- Spectroscopic reflectometer (SR)
- Spectroscopic ellipsometer (SE)
- Optical critical dimension (OCD)
- Diffraction based overlay (DBO)
- Wafer stress/bow
. Available for 200mm or 300mm wafer
. Dual Cassette Station
. LCD Touch Screen UI
. Kawasaki Robot with & Dual robot arm
. Key-Lock EMO buttons
. SECS II
. 3.5?Floppy Drive
. DVD-RW Drive
. CE Marked
. Power Requirements: 208~230V, 13A, PH 1, Freq 50/60Hz
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