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장비정보
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장비명
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SSM 150 Auto Spreading Resistance Probe (ASRP) |
| 모델명 |
SSM150 |
제조사 |
SOLID STATE MEASRUEMENT INC. |
| 웨이퍼사이즈 |
Other
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Vintage |
1998- |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
*. Process: Spreading resistance probe
*. Measurement perfomance:
- Resistivity and Dopant concentration
- Resistance measurement & Carrier concentration profile analysis in all structures of silicon
Resistance: 1 1 to >E10
Resistivity: 10-⁴Ωcm~4x10⁴
Dopant Concentration: >10²¹cm-³ to < 10¹¹cm-³
*. Measurement configuration:
- Carrier concentration profile analysis & Depth measurement
*. Hardware configuration:
- Standard Microscope/Probe Assembly Test Unit
- Electronics Cabinet with Probe Unit, Pneumatics Control, etc
- Probe subsystem with Anti-Vibration table
- Optic Fiber Light Sources and Holder
- IBM Computer Package & LCD Color monitor
- 110V/50/60Hz
*. Software configuration:
- Operation System: MS DOS 3.3
- Operation Software: D150 Version 5.12
*. Accessory (Option):
- Lapping Machine (manual), Probe set, QTA/PEN, Gorey-Schnider grinder,Angle dies,others
Calibration STD sets
*. Fully refurbished.
*. Installed
*. Available Demo Test and Inspection |
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