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장비정보
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장비명
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SSM 5200 Automatic CV System for CV/QV/IV measurement |
| 모델명 |
SSM5200 |
제조사 |
SOLID STATE MEASRUEMENT INC. |
| 웨이퍼사이즈 |
8"
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Vintage |
1997- |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
Fully automated capacitance-voltage(CV),charge-voltage(QV), and current-voltage(IV) system
[Direct Measurement]
- Accurately measure CV, QV and IV characteristics of MOS test structures in scribe lines on product wafers.
[Pattern Recognition]
- Vision system for fast pattern recognition for automatic placement of measurement probe.
[Cassette-To-Cassette Loading/Unloading]
- Robotic loading and unloading of wafers with flat or notch alignment.
Fast - Effective oxide charge and carrier density measurements in 50seconds, ion implant dose in 20 seconds.
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