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장비정보
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장비명
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*KLA-Tencor RS 100 Four Point Probe(4PP) |
| 모델명 |
RS-100 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
12"
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Vintage |
2004- |
| 매매상태 |
판매완료
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장비상태 |
Excellent
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| 제원 |
Single 200/300mm open cassette
High speed resistivity tester with integrated heater/temperature-sensor and integrated ceramic probe conditioning plate
Accommodates manual loading all wafer diameters : 2~12"
High-speed, "on-stage", optical wafer aligner including CCD and ring illuminator
One precision probe head of Type A,B,C,D,E,F,H
Pentium III computer with keyboard & trackball
1.4 MB,3.5" floppy drive
CD-ROM drive
Windows NT
Software Version : 2.31
APPLICATIONS
Extensive process applications range from metal deposition, CMP, ion implantation, and diffusion
Measurement of materials such as polysilicon, copper, and bulk silicon substrates
Typical Measurement Specifications
. Measurement range: > 5 mW/sq to < 5 MW/sq
. Absolute accuracy, based on NIST (NBS) traceable standard wafers corrected
to 23°C: ±1% of certified value
. Measurement repeatability, based on KLA-Tencor’s “Probe Qualification Test”
@ 1” test diameter, using the appropriate probe head: <0.2% (1s)
. Reproducibility: Representative metals (e.g. Cu, W, TiN) s < 0.5%
. Edge exclusion: 1mm from the edge of the conductive film
Measurement Capabilities
. Routine check: 1-30 sites programmable (ASTM standard tests included)
. XY maps and flexible, user-defined patterns: up to 1,200 sites programmable
Facility
. AC Voltage : VAC 200~240
. Vacuum : In/Hg (min 25"Hg)
. Air : 80~100 PSI
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