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장비정보
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장비명
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N&K 5700 CDRT Metrology system |
| 모델명 |
N&K 5700 CDRT |
제조사 |
N&K |
| 웨이퍼사이즈 |
Other
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Vintage |
2006-11 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.
Spotsize: R = 50um, T < 400um
The n&k 5700-CDRT automated system is designed for handling 5” or 6” square masks.
The n&k 5700-CDRT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system.
This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.
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