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장비정보
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장비명
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Tencor P-12 Step Height Measurement System |
| 모델명 |
P-12 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
1996-12 |
| 매매상태 |
판매중
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장비상태 |
Excellent
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| 제원 |
P12 Long Scan Profiler (Step Height Measurement)
- 8" chuck
- Micro Head II with L type stylus (Red 12.5 um).
- Measurement Range: 6.5㎛,26㎛,131㎛.
- Scan Length: 150mm.
- Scan Speed : 1㎛ ~ 25 mm/sec.
- Stylus Force: 0.05 ~50mg.
- Motorized X-Y stage
- OS Windows 3.1, - S/W Version: 3.1.9
- Utility: Vacuum.
- Power: 110V/50HZ, 4A.
- Installed in Clean-room. |
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