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장비정보
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장비명
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Tencor Viper 2410 Macro Defect Inspection |
| 모델명 |
VIPER 2410 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
2001-1 |
| 매매상태 |
판매중
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장비상태 |
AS-IS
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| 제원 |
KLA-Tencor's 2401 Automated Macro Defect Inspection System
- Replacing the manual bright light macro defect inspection performed by operators.
- Automated detection, classification and reporting of all yield- critical macro after-develop inspection defect types,
including hotspots, scratches, large particles, extra and missing resist, unexposed fields, striations, developer spots and splashback.
- With sensitivity superior to that of operators, the 2401 Automated Macro Defect Inspection System detects defects reliably and repeatably, allowing disposition decisions to be made quickly and accurately, dramatically reducing scrap and preventing further investment in low-yielding wafers. |
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