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장비정보
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장비명
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*Tencor / Prometrix RS 75 TCA Four Point Probe(4PP) |
| 모델명 |
RS75TCA |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
8"
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Vintage |
1999-3 |
| 매매상태 |
판매완료
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장비상태 |
Excellent
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| 제원 |
Measurement Specifications
- Measurement range: <5 mΩ/sq to >5MΩ/sq
- Absolute accuracy: based on NIST (NBS) standard
- Measurement repeatability, based on KLA-Tencor's : <0.2% ( l σ )
- Edge exclusion: 3 mm 25 mil probe head /4 mm with 40 mil probe head / 5 mm with 62.5 mil probe head
- Temperature measurement accuracy: ±0.5°C
- Temperature measurement repeatability: ±0.2°C
- Throughput, based on 5-site test, single cassette ≥100 WPH
Measurement Capabilities
- Routine check: 1-30 sites programmable
- XY map: up to 1,200 sites programmable
Analysis Capabilities
- Contour/3-D map: Max 625 sites
- Probe qualification test: 20 sites, programmable radius
- Trend and SQC charts & Histograms
- File editing and data extraction capability
- Calibration curves for low dose monitoring
- Average, difference and ratio maps •; Temperature coefficient of resistance curves
Data Transfer
- SECS II or RS232 communication (data upload)
Hardware
- all standard wafer diameters in thicknesses up to 2 mm: 2~8 inch
- 486/66 Mhz computer •; 300 MB fixed hard drive
- 44 MB removable hard drive /-1.4 MB, 3.5" floppy drive
- High resolution color monitor
- 100 mm to 200 mm dual-cassette wafer handler
- High speed, integrated flat aligner |
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