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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Tencor P-20(H) Step Height Measurement Sytem |
| Model |
P-20H |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
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| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
- Long Scan Profiler Measurement.
- Micro Head with L type stylus.
- Measurement Range: 100 ~ 0.3mm Height.
- Scan Length: 210mm.
- Scan Speed : 1зн ~ 25 mm/sec.
- Stylus Force: 1 ~100mg.
- Motorized X-Y stage (max sample size:254x254mm).
- 486DX PC & LCD Color Monitor, Windows 3.1.
- Option: Precision Locator,Wafer Handler.
- Utility: Vacuum.
- Power: 110V/50HZ, 4A.
- Anti-bivration table.
- Installed in Clean-room. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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