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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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SDI/SEMILAB FAaST 230 Non-contact CV/IV Measurement System |
| Model |
FAaST 230 |
Maker |
SDI/SEMILAB |
| Wafer Size |
8"
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Vintage |
- |
| Sell Status |
SELL
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Tool's Condition |
AS-IS
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| Description |
. Up to 8"
. Automatic robotic wafer handling
. Single open-cassette wafer loading station
. Measurement of dielectric and interface properties on monitor wafer
- Dielectric Capacitance (CD) and Thickness (EOT)
- Dielectric Leakage Current (I-V)
- Flatband Voltage (Vfb)
- Interface Trap Density (Dit)
- Interface Trapped Charge (Qit)
- Semiconductor Surface Barrier (Vsb)
- Oxide Total Charge (Qtot)
- Mobile Ionic Charge (Qm), among others
. Suitable for measurement on:
- Semiconductor wafers (e.g. Si, SiGe, InGaAs, SiC, GaN) with high-k and low-k dielectric films (e.g. SiO2, SiNx, Al2O3, HfO2 ;..) |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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