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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Semilab WT-2020( レ-PCR) Carrier life time measurement |
| Model |
WT-2020 |
Maker |
SDI/SEMILAB |
| Wafer Size |
8"
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Vintage |
2018-4 |
| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
＝ System Configuration
. WT2020 main unit with scanning capability
. Dual PC : DOS PC & Window PC
. レ-PCR head for lifetime measurements
. Application S/W : WSOS2 ( DOS PC ), Wintau 32 ( Windows PC )
. Vacuum pump
. Utility :
- Power : 220V or 115V, 50/60Hz
- Vacuum : 1/4" 0.2 ~0.5 bar
＝ Hadware Function Capability
. レ-PCD measurement (904 nm Laser)
. Laser Power Feedback
. AUX Laser (Option) : 500 mW, 349nm
. Others
＝ Application
. Monitoring defects and contamination ( bulk and surface region of Si wafer)
. Characterization of thin film samples
＝ Measurement
. Carrier Lifetime Measurement ( レ-PCD/レ-PCD )
. High resolution mapping and discrete point measurements
. Characterization of thin film samples
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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