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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Semilab WT-2000PVN( ¥ì-PCD) Carrier life time measurement |
| Model |
WT-2000PV |
Maker |
SDI/SEMILAB |
| Wafer Size |
8"
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Vintage |
2009-5 |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
¡á System Configuration
. WT2000PV main unit with scanning capability
. Sample stage (Max wafer size 200mm)
. Dual PC : DOS PC & Window PC
. ¥ì-PCD head for lifetime measurements
. Application S/W : Wintau 32 ( Windows PC )
. Vacuum pump
. Utility :
- Power : 220V or 115V, 50/60Hz
- Vacuum : 1/4" 0.2 ~0.5 bar
¡á Hadware Function Capability
. ¥ì-PCD measurement (904 nm Laser)
. Laser Power Feedback
. Automatic Head Height
. Capacitive Sensor
. Head Temperature Sensor
. Others
¡á Application
. Monitoring defects and contamination ( bulk and surface region of Si wafer)
¡á Measurement
. Carrier Lifetime Measurement (¥ì-PCD), Laser wavelength : 904nm
. High resolution mapping and discrete point measurements
*. Fully refurbished.
*. Installed in Clean-room.
*. Can demonstrate any time. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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