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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Tencor P-17 stylus surface profiler |
| Model |
P-17 |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
2017- |
| Sell Status |
SELL
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Tool's Condition |
Refurbishing
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| Description |
[Features]
- Step height: Nanometers to 1000µ;m
- Step height repeatability : 4 Å; ( 1¥ò, 1µ;m )
- Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg )
- Scan full diameter of the sample without stitching for bow and film stress measurement
- Fully motorized 200mm XY stage, Z stage, 360¡Æ theta stage and level stage
- Dual view optics ( side and top )
- Fully automated with sequencing, pattern recognition
[Applications]
- Step Height mesurement (2D/3D)
- Roughness and Waviness
- Bow and Shape
- Thin film Stress
- Defect review ( Defect surface topography)
*. To be refurbished.
*. Installed in Clean-room. |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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