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Tool's Specification.
Tool Name Tencor P-11 Step Height Measurement System
Model P-11 Maker KLA TENCOR
Wafer Size 8" Vintage 1997-5
Sell Status SELL Tool's Condition Refurbishing
Description - Long Scan Profiler P-11 Measurement.
- Micro Head sr with Orange stylus.
- Measurement Range: 13зн,65зн,327зн.
- Scan Length: 210mm.
- Scan Speed : 1зн ~ 25 mm/sec.
- Stylus Force: 1 ~ 50mg.
- Motorized X-Y stage (max sample size:254x254mm).
- Pentium 233MHz, Ram 31MB & 17" LCD Color Monitor, Windows 3.1.
- Utility: Vacuum.
- Power: 115V/50HZ, 4A.
- Installed in Clean-room.
     
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922