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Tool's Specification.
Tool Name SSM 150 Auto Spreading Resistance Probe (ASRP)
Model SSM150 Maker SOLID STATE MEASRUEMENT INC.
Wafer Size Other Vintage 1999-
Sell Status SELL Tool's Condition Excellent
Description *. Process: Spreading resistance probe
*. Measurement perfomance:
- Resistivity and Dopant concentration
- Resistance measurement & Carrier concentration profile analysis in all structures of silicon
Resistance: 1 1 to >E10
Resistivity: 10-昂目cm~4x10昂
Dopant Concentration: >10昌易cm-昆 to < 10易易cm-昆

*. Measurement configuration:
- Carrier concentration profile analysis & Depth measurement

*. Hardware configuration:
- Standard Microscope/Probe Assembly Test Unit
- Electronics Cabinet with Probe Unit, Pneumatics Control, etc
- Probe subsystem with Anti-Vibration table
- Optic Fiber Light Sources and Holder
- IBM Computer Package & LCD Color monitor
- 110V/50/60Hz

*. Software configuration:
- Operation System: MS DOS 3.3
- Operation Software: D150 Version 5.12

*. Accessory (Option):
- Lapping Machine, N/P Type unit and Probes,QTA/PEN, Gorey-Schnider grinder,Angle dies,others
(100)N.P (111)N,P calibration STD sets

*. Fully refurbished.
*. Installed in Clean-room.
*. Available Demo Test and Inspection
       
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922