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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Nanometrics Nanospec 6100UV Thin Film Thickness Measurement |
| Model |
NANAOSPEC 6100 |
Maker |
NANOMETRICS |
| Wafer Size |
8"
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Vintage |
2007-3 |
| Sell Status |
SELL
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Tool's Condition |
Excellent
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| Description |
?Measurement Range : 25?- 20탆
- 500?-200 um with the visible light source (400 to 800nm halogen lamp)
- 25?- 500?with UV light source (210 - 400nm Deuterium lamp).
?Linear Array Head
?Automated focusing
?Joystick-automated stage with twin chuck ( 8inch, 6inch)
?CV -S3200 CCD Camera
?Objectives (Auto revolver) : Olympus 4X, 10X, 15X
?2D and 3D wafer-mapping software
?S/W Version : 1.63, OS : Windows 2000
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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