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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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Nanometrics Nanospec 9300 Thin Film Thickness Measurement |
| Model |
Nanospec 9300 |
Maker |
NANOMETRICS |
| Wafer Size |
12"
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Vintage |
2002-6 |
| Sell Status |
SELL
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Tool's Condition |
Operational
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| Description |
Currently 12" configured (It can be modified for 8" open cassette handling)
Spectroscopic Reflectometer (SR)
Two optical light sources
Visable tungsten halogen lamp
UV deuterium arc lamp
Lens 4x,15x (Visible & UV)
System Computer & LCD Monitor
Windows XP-based N2000 metrology software(Version N2000 4.2.90 Beta)
Head Type : UV DIO
Video camera : RS170(B/W)
Wafer Handling
Kensington Robot & Stage
Asyst FOUP 300mm
Input power
208VAC 18A 50/60Hz
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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