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Tool's Specification.
Tool Name Tencor P-16+ stylus surface profiler
Model P-16+ Maker KLA TENCOR
Wafer Size 8" Vintage 2013-3
Sell Status SELL Tool's Condition Excellent
Description The KLA-Tencor P-16+ Profiler is a highly sensitive surface profiler that measures step height, roughness, and waviness on sample surfaces.

- Up to 8" wafer size
- Microhead 5 - xr
- Stylus tip (green): 2 um radius
- Dual view optic (Top & side)
- Lens : 6.4X , Magnification Range : 173X~750X
- Frame Grabber : USB Camera (Ueye UI221x-M)
- OS: Windows XP
- S/W: Ver 7.45
- Option S/W : APEX
- Repeatability : 7.5 Å;;; or 0.1% (1 s),
- Including Anti-Vibration Table

*. Installed in Clean-room.
*. Can demonstrate any time.

   
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922