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Tool's Specification.
Tool Name TMS 2000 Texture Measurement System
Model TMS 2000 Maker Schmitt Measurement System
Wafer Size 6" Vintage 1997-8
Sell Status SELL Tool's Condition AS-IS
Description TMS-2000 - the fastest, most accurate,non-contact texture measurement system in the world.
This advanced system is ideally suited for quantifying and mapping full surface, interrupted, and zone textures.
It is currently being used successfully by major disk and wafer manufacturers.
You will discover the ultimate solution to fast, accurate microroughness measurements in disk and wafer manufacturing.

The TMS-2000 series offers several features that provide for easier operation and require minimal operator training.

[ Feature ]
RA, RMS roughness results from .1 to 5,000Å; (Angstrom)
Lower costs than Profilometer, AFM or Interferometers

Resolution precision of 0.01 Angstrom,
Reproducibility กพ0.5 Angstrom or 1%,
Repeatability กพ0.2 Angstrom or 0.5%
Typically 50 test points per second
Non-contact measurements cannot harm test surfaces
 
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