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Tool's Specification.
Tool Name N&K OptiPrime - CD
Model OptiPrime - CD Maker N&K
Wafer Size 8" Vintage 2015-
Sell Status SELL Tool's Condition Excellent
Description Key Qualities of OptiPrime - CD

¡á Optimized Polarized Reflectance (Rs and Rp) Data
- Wavelength Range: 190 - 1000 nm
- Micro-Spot Technology
¡á Can be configured for 200 mm (8¡±),and 150 mm (6¡±) Wafers
¡á Fully Automated
¡á Based on Patented Reflective Optics that Optimizes the Signal-to-Noise Ratio
¡á Strong Sensitivity to Sub-Nanometer Structural and Material Variations
- Thickness, n and k (from 190 –; 1000 nm)
¡á OCD Metrology for 2-D and 3 -D Structures
(Trenches and Contact Holes)
- Depth, CD, Profile
¡á Cognex Pattern Recognition Software
¡á No Re-Alignment Issues Upon Light Bulb Replacement
¡á Modular design –; Easy to Maintain and Service
¡á GEM/SECS Communication Interface
¡á SEMI Standard and Third Party Certifications

¡á Dimensions (W x D x H): 112 cm x 202 cm x 189 cm
¡á Weight (unpacked): 770 Kg
¡á Facility Requirements:
100 - 240 V, 50/60 Hz, 1¥Õ
Vacuum, CDA (for FOUP Load Port)

*** Installed in cleanroom,Excellent working condition.
System performance check data:
1) Total Baseline Fluctuation : 0.55 ( spec < 0.75 )
2) Thickness Repeatability : 0.24¡Ê ( spec < 1.0 ¡Ê,1¥ò)
   
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922