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Tool's Specification.
Tool Name *(Sold)KLA-Tencor HRP 340 High Resolution Profiler
Model HRP340 Maker KLA TENCOR
Wafer Size 12" Vintage 2007-
Sell Status SOLD Tool's Condition Excellent
Description [OVERVIEW]
KLA-Tencor뭩 P-340 and HRP-340 stylus profilers are the most production worthy surface metrology
solutions available in the leading edge 300mm market. The 340 series are based on decades of
technology enhancements which allow them to support the most advanced applications at the lowest
cost. Established use cases include etch, CMP, and C4 bump monitoring, while new applications
continue to develop in emerging markets.
The 340 series is available in various configurations designed to meet cost, performance, and automation
requirements. The handler can be configured as a single open cassette, or dual FIMS for the most stringent
particle requirements. Measurement scans use a patented dual-stage technology combining a linear-encoded
long-scan sample stage for scans up to the full diameter of the substrate (P-340) and a configurable piezo
flexure sensor stage for high resolution scans (HRP-340). Both configurations utilize the KLA-Tencor뭩
proprietary UltraLite?sensor technology for maintaining constant tip-sample forces and vertical linearity
over the full Z range. New manufacturing techniques have allowed smaller stylus shapes to extend into
advanced applications, while preserving the unmatched robustness with its diamond material

[CONFIGURATION]
?P-Series offers long-scan, sample stage profiling capability with open cassette or dual FIMS handler.
?HRP-Series offers high resolution, sensor stage and long-scan, sample stage profiling capabilities with open cassette or dual FIMS handler.
  - Address: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
   - Phone: 82-41-554-6920~1 FAX: 82-41-554-6922