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 HOME >Tool's Information |
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Tool's Specification.
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Tool Name
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*Tencor UV1050 Thin Film Mesurement System |
| Model |
UV1050 |
Maker |
KLA TENCOR |
| Wafer Size |
8"
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Vintage |
1995-7 |
| Sell Status |
SOLD
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Tool's Condition |
AS-IS
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| Description |
[Hardware Components]
*Measurement Unit
Stage Resolution: xy - 0.25レm, z - 0.025レm
Spot Placement13: ‐ 1.5レm
Standard Wafer Sizes: 100, 125, 150, and 200mm
Illumination Source: Broadband Xenon Arc Lamp
Objectives: Automatic, 3-position turret:1X, 4X (visible light only), 15X
Spot Sizes: 40, 10, 2.7レm / Maximum Field of View: 1.125mm x 1.5mm (nominal)
Focus: Automatic focus on measurement site
*Controller : Pentium based computer
*Auto Wafer Handler
Cassettes (2 positions)
Wafer Pre-Alignment:Optical non-contact,centered and notch or flat aligned
[Test and Analysis Capabilities]
Mapping : Die, contour, 3-D / Scanning : Diameter scan / Sampling : Quick tests: user definable
[Measurement Capabilities]
Film Thickness
- Oxides/ Nitrides/Oxynitrides/Photoresists/Polyimides
- Oxide on Poly /Poly on Oxide/ Poly on Nitride/Amorphous Silicon/Oxide on Aluminum/Oxide on Tungsten
Refractive Index : Oxide /Oxynitride/Nitride
Reflectivity |
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- Address:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- Phone:
82-41-554-6920~1 FAX: 82-41-554-6922
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