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设备信息
设备名称 N&K 1700-RT Metrology system
型号 1700RT 制造商 N&K
晶元尺寸 Other Vintage 2005-6
销售状态 销售中 设备状态 Refurbishing
数据 Broadband spectrometry for film thickness and trench profile measurements on photomask reticles.

Spotsize: R = 50um, T < 400um with manual loading.

The n&k 1700-RT is designed for handling 5” or 6” square masks.

The n&k 1700-RT simultaneously determines thickness, n and k in the spectral range of 190-1000nm, and trench profile. These systems provide non-destructive, real time, high throughput measurements directly on the device and collect polarized reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point. These systems encompass advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system.

This system includes a polarizer and special trench analysis software and provides non-destructive, real-time measurements of CD, trench depth, and profile.
 
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - 电话: 82-41-554-6920~1 传真: 82-41-554-6922