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 HOME >设备信息 |
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设备信息
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设备名称
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*KLA-Tencor Archer AIM+ Overlay Metrology |
| 型号 |
Archer AIM+ |
制造商 |
KLA TENCOR |
| 晶元尺寸 |
12"
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Vintage |
2006- |
| 销售状态 |
销售完毕
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设备状态 |
Refurbished
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| 数据 |
Currently 12" configured,
( Available size conversion for 8" open cassette handling )
Overlay measurement for ≥45 nm technology nodes
Archer AIM+ Main :
Industrial PC & LCD monitor
Software Version(OS) : Windows XP,V2002SP1
Software Version(APP) : Archer 5.50.03P01
AIM
Multilayer
ANRA
BFCD
CPM
VIS Color Filter
E40E90E94
E87
GEM
Target diagnostic
XY Separation
Imageless
Kawasaki Robot & Robot controller
TDK TAS300 Loadport (Triple)
Installed in our cleanroom.
Demo test available
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- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
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