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设备信息
设备名称 TMS 2000 Texture Measurement System
型号 TMS 2000 制造商 Schmitt Measurement System
晶元尺寸 6" Vintage 1997-8
销售状态 销售中 设备状态 维修中
数据 TMS-2000 - the fastest, most accurate,non-contact texture measurement system in the world.
This advanced system is ideally suited for quantifying and mapping full surface, interrupted, and zone textures.
It is currently being used successfully by major disk and wafer manufacturers.
You will discover the ultimate solution to fast, accurate microroughness measurements in disk and wafer manufacturing.

The TMS-2000 series offers several features that provide for easier operation and require minimal operator training.

[ Feature ]
RA, RMS roughness results from .1 to 5,000Å; (Angstrom)
Lower costs than Profilometer, AFM or Interferometers

Resolution precision of 0.01 Angstrom,
Reproducibility ±0.5 Angstrom or 1%,
Repeatability ±0.2 Angstrom or 0.5%
Typically 50 test points per second
Non-contact measurements cannot harm test surfaces
 
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - 电话: 82-41-554-6920~1 传真: 82-41-554-6922