Metrology
 
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Àåºñ¸í Tencor P-20(H) Step Height Measurement Sytem
¸ðµ¨¸í P-20H Á¦Á¶»ç KLA TENCOR
¿þÀÌÆÛ»çÀÌÁî 8" Vintage -
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Á¦¿ø - Long Scan Profiler Measurement.
- Micro Head with L type stylus.
- Measurement Range: 100 ~ 0.3mm Height.
- Scan Length: 210mm.
- Scan Speed : 1§­ ~ 25 mm/sec.
- Stylus Force: 1 ~100mg.
- Motorized X-Y stage (max sample size:254x254mm).
- 486DX PC & LCD Color Monitor, Windows 3.1.
- Option: Precision Locator,Wafer Handler.
- Utility: Vacuum.
- Power: 110V/50HZ, 4A.
- Anti-bivration table.
- Installed in Clean-room.
 
  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922