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Àåºñ¸í SSM 150 Auto Spreading Resistance Probe (ASRP)
¸ðµ¨¸í SSM150 Á¦Á¶»ç SOLID STATE MEASRUEMENT INC.
¿þÀÌÆÛ»çÀÌÁî Other Vintage 1999-
¸Å¸Å»óÅ ÆǸÅÁß Àåºñ»óÅ Excellent
Á¦¿ø *. Process: Spreading resistance probe
*. Measurement perfomance:
- Resistivity and Dopant concentration
- Resistance measurement & Carrier concentration profile analysis in all structures of silicon
Resistance: 1 1 to >E10
Resistivity: 10-©ù¥Øcm~4x10©ù
Dopant Concentration: >10©÷©öcm-©ø to < 10©ö©öcm-©ø

*. Measurement configuration:
- Carrier concentration profile analysis & Depth measurement

*. Hardware configuration:
- Standard Microscope/Probe Assembly Test Unit
- Electronics Cabinet with Probe Unit, Pneumatics Control, etc
- Probe subsystem with Anti-Vibration table
- Optic Fiber Light Sources and Holder
- IBM Computer Package & LCD Color monitor
- 110V/50/60Hz

*. Software configuration:
- Operation System: MS DOS 3.3
- Operation Software: D150 Version 5.12

*. Accessory (Option):
- Lapping Machine, N/P Type unit and Probes,QTA/PEN, Gorey-Schnider grinder,Angle dies,others
(100)N.P (111)N,P calibration STD sets

*. Fully refurbished.
*. Installed in Clean-room.
*. Available Demo Test and Inspection
       
  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922