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장비정보
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장비명
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*KLA-Tencor Candela 8620 Optical Defect Inspection |
| 모델명 |
Candela 8620 |
제조사 |
KLA TENCOR |
| 웨이퍼사이즈 |
6"
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Vintage |
2010-9 |
| 매매상태 |
판매완료
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장비상태 |
Excellent
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| 제원 |
KLA-Tencor Candela 8620 Optical Surface Analyzer (OSA) is a laser-based inspection system for semiconductor and optoelectronic wafers.
It is fully automated with integrated wafer handling for cassette-to-cassette operation.
The Candela defect detection system simultaneously measures surface reflectivity and topography for automatic defect detection and classification.
The defect detection system's inspection technology combines scatterometry, ellipsometry, reflectometry, and topographical analysis to non-destructively inspect wafer surfaces for defects, and film thickness uniformity, of opaque substrates, epi layers, and transparent film coatings (SiC, GaN, sapphire).
. Wafer Size : 2 ~8 inch (Currently 2" stage configured)
. Cassette Handling
- Standard: Single puck with up to 200 mm cassette handler capability
. Illumination Source : 50 mW, 405nm wavelength red laser
. Operator Interface : Trackball and keyboard standard
. Substrate Thickness : 380 ~1,100 μm
. Substrate Material : Any clear or opaque polished surface that scatters < 10% of incident light
. Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si)
Application:
1. Opaque substrates
2. EPI Layers
3. Transparent film coatings (SiC, GaN, Sapphire).
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