Metrology
 
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Àåºñ¸í *Semilab WT-2000
¸ðµ¨¸í WT-2000D Á¦Á¶»ç SDI/SEMILAB
¿þÀÌÆÛ»çÀÌÁî 8" Vintage 2007-2
¸Å¸Å»óÅ ÆǸſϷá Àåºñ»óÅ Excellent
Á¦¿ø [System Configuration]
Basic units

WT-2000 main unit with scanning capability
Sample stage (max wafer size : 200mm or 300mm)
Dual PC : DOS PC and Windows PC

Measurment capabilities

Life time measurement (¥ì-PCD)
Diffusion length measurement (SPV)
Fe concentration measurement
     
  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922