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 HOME >设备信息 |
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设备信息
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设备名称
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*N&K 3000 Trench Depth & Thin film thickness Measurement |
| 型号 |
N&K 3000 |
制造商 |
N&K |
| 晶元尺寸 |
8"
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Vintage |
- |
| 销售状态 |
销售完毕
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设备状态 |
Excellent
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| 数据 |
n&k analyzer 3000 can simultaneously determine thickness and n&k spectra for all type of film/substrate combinations of pattrened and non-pattered wafers
Non-destructive measurements of Trench Depth
Thickness, Refractive Index(n,RI) Extinction Coefficient (k), Energy Bandgap measurements of thin film
and also measure reflectance, transmittance, and interface roughness for a wide variety of thin films and substrates
- Wafer size up to 6" ( available 8" by conversion)
- Fully automatic wafer handling
- Wavelength range DUV-VIS-NIR : 190 to 1000 nm
- 50 um spot size
- Measurement thin films : OXIDE/PR/NITRIDE/OXINITRIDE/POLY/Ti/TiN…
- Measurement items : Trench Depth, thickness, n(RI), K, Reflectance, Transmittance,..
- 2D/3D Map
Currently installed in cleanroom
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- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
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