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设备信息
设备名称 SDI/SEMILAB FAaST 200-SL CV/IV Measurement
型号 FAaST 200 SL 制造商 SDI/SEMILAB
晶元尺寸 8" Vintage -
销售状态 销售中 设备状态 维修中
数据 non-contact electrical C-V & I-V measurement system capable of measuring on product wafers.
Measurements can be made in scribe line test sites or in the active cell area.
Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues.
Major applications include measurements of SiO2, Nitrided Oxides, advanced high-K and low-K dielectrics
   
  - 总公司: 3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
  - 电话: 82-41-554-6920~1 传真: 82-41-554-6922