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 HOME >设备信息 |
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设备信息
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设备名称
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N&K 3700 RT Metrology System |
| 型号 |
N&K 3700 RT |
制造商 |
N&K |
| 晶元尺寸 |
8"
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Vintage |
2004-7 |
| 销售状态 |
销售中
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设备状态 |
维修中
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| 数据 |
Broadband spectrometry for film thickness on transparent substrates, including photomask reticles.
Spotsize: R = 50um, T < 400um
The n&k 3700-RT automated system is designed for handling 5” or 6” square masks or up to 8” square samples.
These systems can also be configured for transparent wafers.
The n&k 3700-RT simultaneously determines thickness, and n and k in the spectral range of 190-1000nm and provide non-destructive, real time, high throughput measurements directly on the device. This system collects reflectance and transmission data (in the spectral range from 190-1000 nm) at the same point and encompasses advanced pattern recognition software, patented microspot measurement technology and a unique all-reflective optical based system. |
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- 总公司:
3, Tongjeong 3-ro, Dongnam-gu, Cheonan-si, Chungcheongnam-do, Korea ,31208
- 电话:
82-41-554-6920~1 传真: 82-41-554-6922
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