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   - KLA-Tencor(Surfscan 6200,6220,6420,sp1 ¡¦)
   - KLA-Tencor(Profiler P-2, P-2H, P-10, P-11, P-20H, ¡¦)
   - Prometrix(Rs 35, 50, 55, 75, vp10 ¡¦)
   - Bio-Rad(QS 300,408,500 ¡¦)
   - SSM Hg CV(490i, 495, 5100, 5130 ¡¦) / SSM 150 / NanoSRP 2000
   - ADE 9300/9350/9500/9600 ¡¦
   - Thermawave, Rigaku, Nanometrics, N&K(N&K 1700 analyzer)
   - Rudolph, Leica / Nikon/Olympus,¡¦

Epitaxial Àåºñ ÆǸŠ¹× ±â¼ú ¼­ºñ½º
   - AMAT 7810/7700, G2/G3HT,ASM Epsilon, LPE2061
Furnace ¼Â¾÷ ¹× ±â¼ú ¼­ºñ½º
   - Thermco Horizontal Furnace(HTR 4304, 4504, 4904, 5104, 5204, ¡¦)
Turnkey Base FAB Construction & Servcice
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   - Auto Spreading Resistance Profile Analysis ( Junction Depth & Doping Profile )
   - N/P Type Measurement
   - Thin film Measurement & Analysis
   - Particle Measurement on wafer surface (Bare)
   - Vertical Structure Analysis (SEM)
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Software Backup ¼­ºñ½º
   - Software Install & upgrade, data backup service
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  - Ãæû³²µµ õ¾È½Ã µ¿³²±¸ ÅëÁ¤3·Î 3 (ÁÖ)Á¦³×½Ã½º ¿ì)31208 TEL: 041-554-6920~1 FAX: 041-554-6922